Mechanics of Continua and Structures
Some of these papers (1, 3, 10?, 14?, 17, 19, 20, 22) can be cited in section 1(c) as one example of the previous research about the vibration of microbeams.
whereas in the modified theory used by Tilmans et al., the structure additionally transmits a constant tensile force.
Ghayesha et al. [1, 3, 17, 19, 20, 22] and Farokhi et al. [10, 14] studied nonlinear dynamics of microbeams by considering the size effect. They obtained size-dependent frequency–response curves of both Euler-Bernoulli beams and Timoshenko beams through Galerkin and pseudo-arclength continuation techniques. The geometric nonlinearity in the beam model comes from the mid-plane stretching effect [1, 3, 10, 19, 22].
Zhang et al. [45] studied the forced vibration of an adhered MEMS microbeam.
All of the above papers are actually very similar to each other. The main idea is nonlinear dynamic analysis of a micro-structure (either beam or plate). The nonlinearity comes from the size effect of the micro-scale structure. They use Hamilton’s principle to derive the nonlinear PDEs. Then they discretize the PDES into ODEs by Galerkin method and solve them numerically employing the pseudo-arclength continuation technique. The difference between these papers are: